Semiconductor Lubricants Engineered for Clean, Stable Vacuum
PPE vacuum pump fluids, high-purity base fluids, optical fluids, and connector lubricants for semiconductor fab equipment.
SantoLubes manufactures high-performance PPE (perfluoropolyether) lubricants, vacuum pump fluids, and specialty greases engineered for the demanding conditions inside semiconductor fabrication equipment.
Our fluids deliver ultra-low backstreaming, exceptional thermal stability, and contamination control for diffusion pumps, process chambers, and precision tool components.
Ultra-Low Backstreaming & Volatility
Contamination-Sensitive Performance
PFAS-Free PPE Chemistry
Built for the Demands of Semiconductor Manufacturing
Semiconductor fab equipment runs in ultra-high vacuum, high-purity, and contamination-sensitive environments. SantoLubes PPE fluids are engineered to meet these exacting process requirements.
Protect Ultra-High Vacuum Integrity
Minimize Backstreaming & Outgassing
Support Contamination-Sensitive Processes
Withstand High Process Temperatures
Resist Aggressive Process Chemistry
Keep Metrology & Inspection Optics Clear
Improve Connector Reliability in Tools
Reduce PFAS Exposure in the Fab
Advanced Lubricant Technologies. Built for Process Purity.
From ultra-high vacuum diffusion pumps to contamination-sensitive metrology tools, SantoLubes PPE fluids match the performance of PFPE chemistry while supporting your PFAS-reduction goals.
Product Technologies for Semiconductor Fab Challenges
Each SantoLubes product line is engineered for specific fab fluid behaviors: vacuum performance, thermal stability, optical clarity, or electrical contact protection.
SantoVac® PPE Vacuum Fluids
SantoVac 5P Ultra
Very high purity PPE fluid with negligible backstreaming for contamination-critical UHV chambers.
SantoVac 5 PPE
Low volatility, thermally stable fluid for diffusion pumps and load-lock systems.
SantoVac 9
Higher viscosity PPE fluid for diffusion pumps requiring extended fluid life.
SantoLubes® PPE Base Fluids
OS-124 /
OS-138 /
OS-750
PPE base fluids for specialty lubricants and greases used in vacuum-side mechanisms, wafer handling, and heated tool components. Selected by viscosity and thermal profile to match equipment design.
SantoLight™ Optical Fluids
SantoLight SL-5262
High refractive index fluid with low particulate and low fluorescence for metrology and inspection optics.
ACCL® Electronic Connector Lubricants
ACCL-52T / ACCL-53T / ACCL-54T
Fretting and corrosion protection for tool electronics and sensor connectors without affecting conductivity.
ACCL-7T
Life-of-device protection for electronic components up to 150°C.
| Fab Application / Challenge | Recommended Products | Why It Fits | Semiconductor Relevance |
|---|---|---|---|
| Diffusion pumps on process and load-lock systems | SantoVac® 5 PPE, SantoVac® 9 | Low volatility, thermal stability, and long fluid life. | Ultra-high vacuum with reduced maintenance intervals. |
| Contamination-critical UHV chambers | SantoVac® 5P Ultra | Very high purity and negligible backstreaming. | Semiconductor qualified for clean, stable vacuum. |
| Replacing PFPE vacuum fluids | SantoVac® 5P Ultra, SantoVac® 5 PPE, OS-750 | PPE vacuum performance without fluorinated chemistry. | Reduces PFAS dependence in fab equipment. |
| High-temperature tool components | SantoLubes® OS-124, OS-138, OS-750 | Thermal stability and low volatility. | Suited to heated hardware and long service intervals. |
| Vacuum-side mechanisms / wafer handling | PPE-based specialty lubricants and greases (application specific) | Low vapor pressure and broad material compatibility. | Formulated to system design and cleanliness targets. |
| Metrology, inspection, and photonic assemblies | SantoLight™ SL-5262 | Optical clarity, index matching, and low particulate. | Supports precise, stable optical measurement. |
| Tool electronics, sensors, and connectors | ACCL-52T, ACCL-53T, ACCL-54T, ACCL-7T | Fretting and corrosion protection without affecting conductivity. | For control systems running around the clock. |
| Custom fab requirements | Custom PPE formulations through SantoTolling | Tailored purity, viscosity, and thermal profile. | Contact SantoLubes for application guidance. |
Note: Product selection depends on equipment design, duty cycle, temperature, vacuum level, material compatibility, and purity requirements. Contact SantoLubes for application-specific guidance.
A PFAS-Free Pathway for PFPE Users
Many fab vacuum systems still run on PFPE fluids. As PFAS regulations expand across manufacturing and supply chains, SantoLubes PPE fluids offer a non-fluorinated alternative that matches PFPE vacuum performance.
Our engineers help plan the changeover, including cleaning and flushing, so residual PFPE does not compromise the new fluid’s performance.
Built for Semiconductor OEMs, Fab Teams & Technical Decision Makers
Semiconductor Equipment OEMs
Fluids for vacuum, motion, and electronic subsystems in new tool designs.
Fab Equipment & Process Engineers
Reliable fluids that protect vacuum integrity and yield.
Vacuum & Facilities Maintenance
Longer pump life and reduced maintenance intervals.
Metrology & Inspection Engineers
Optical fluids for precise, stable measurement.
Specialty Fluid Formulators
High-purity PPE base fluids for custom lubricants and greases.
Research Fabs & Cleanrooms
Clean, stable fluids for university and R&D vacuum systems.
Custom Semiconductor Lubricant Solutions
Not every fab application fits an off-the-shelf fluid. SantoLubes can help evaluate vacuum level, purity, temperature, chemical exposure, connector reliability, and optical requirements for custom formulations.
Request Application Guidance
Every fab tool has its own operating conditions. Request a sample or connect with the SantoLubes technical team.
Samples and Technical Support
Request a sample or connect with the SantoLubes technical team.
Application Review
Discuss your vacuum pump, process chamber, optical assembly, or connector application with a technical representative.
Performance Data
Review technical data for SantoVac®, SantoLight™, and ACCL® technologies.
FAQ
Answers to common questions about SantoLubes technologies in semiconductor applications.
What lubricants are used in semiconductor manufacturing equipment?
Fab tools use several fluid types: vacuum pump fluids for diffusion pumps and high-vacuum systems, low-volatility base fluids for specialty lubricants and greases used in vacuum-side mechanisms and heated components, optical fluids for metrology and inspection assemblies, and connector lubricants for tool electronics, sensors, and control connectors.
Why use PPE fluids in semiconductor vacuum systems?
PPE (perfluoropolyether) fluids offer very low vapor pressure, broad chemical resistance, and thermal stability, making them well suited to the ultra-high vacuum and contamination-sensitive conditions inside semiconductor process equipment.
What is the difference between SantoVac 5 PPE and SantoVac 5P Ultra?
SantoVac 5 PPE is a general-purpose PPE vacuum fluid for diffusion pumps and load-lock systems. SantoVac 5P Ultra is a higher-purity grade with negligible backstreaming, intended for contamination-critical UHV chambers.
Can SantoLubes replace PFPE in my vacuum system?
In many cases, yes. SantoVac PPE fluids match PFPE vacuum performance without fluorinated chemistry, helping reduce PFAS dependence. Our engineers help plan the changeover, including cleaning and flushing, to ensure residual PFPE does not compromise performance.
Where does SantoLight fit in semiconductor applications?
SantoLight SL-5262 is a high refractive index optical fluid with low particulate and low fluorescence, used in metrology, inspection, and photonic assemblies within semiconductor fabs.
Can SantoLubes support custom semiconductor application reviews?
Yes. SantoLubes can evaluate your specific vacuum level, purity, temperature, chemical exposure, connector reliability, and optical requirements to recommend or formulate a custom fluid solution.
